Sun Xiaosong, Sun Xiaonan. TNE EXPERIMBNT RESEARCH OF PT THIN FILM USED IN INFRARED DETECTOR[J]. Journal of Civil and Environmental Engineering, 1994, 16(3).
Sun Xiaosong, Sun Xiaonan. TNE EXPERIMBNT RESEARCH OF PT THIN FILM USED IN INFRARED DETECTOR[J]. Journal of Civil and Environmental Engineering, 1994, 16(3). DOI: 10.11835/j.issn.1674-4764.1994.03.002.
The preparation technology and thermal treatment PT thin film used in infrareddetector and photo-electron devices are studied. The er thin film prepared by multi-ion-beam reac-tive co-sputtering apparams are analysised by x-ray
XPS and EPMA. The impurity of PbO
Pb2Ti2O6 in PT thin film is eleminated and PbTiO3 (001)preferred orientation is improved. The rea-sonable teperature of substrates is given in this paper.